Proteus WorkBench (PWB) is a powerful cockpit tool for the development and optimization of Proteus-based mask synthesis solutions. It is based on a powerful hierarchical GDSII/OASIS layout visualization and editing engine, providing a comprehensive environment for lithography simulation, compact model building, optical proximity correction (OPC) recipe tuning, litho rule checks, and mask synthesis flow development.
Synopsys Proteus WorkBench 2023.12 Linux64 Tested Picture
PWB offers an easy to use platform with access to a wide-ranging set of tools, enabling fast calibration of accurate models, supporting the optimization of highly efficient Proteus recipes for deployment in OPC and verification.
As state-of-the-art lithography exposure tools are operated at their physical resolution limit, new mask and process technologies are being deployed to further shrink features relevant for pattering at advanced technology nodes. Consequently, the requirements for optical proximity correction (OPC) and verification become increasingly challenging.
Compact models calibrated against large experimental datasets need to accurately reflect the lithographic performance for a wide range of designs, and correction recipes need to be optimized with respect to a growing number of parameters.
With Proteus WorkBench (PWB), Synopsys provides a single environment that facilitates model building, Proteus OPC recipe generation and optimization, layout visualization and editing, verification, and supports the development and assessment of resolution enhancement techniques (RETs). PWB combines ease-of-use with high efficiency, resulting in a fast turnaround time for setting up production-ready mask synthesis flows.
Benefits
• Enable high-speed layout visualization and lithographic performance analysis
• Save engineering time through automation
• Optimize parameters for unmatched full chip OPC and RET performance
• Interface with Synopsys rigorous lithography process simulation suite, Sentaurus Lithography (S-Litho)
More information:https://www.synopsys.com/content/dam/synopsys/silicon/datasheets/proteus-workbench-ds.pdf
